D2S, Inc.
Patent Owner
Stats
- 91 US PATENTS IN FORCE
- 1 US APPLICATIONS PENDING
- Mar 15, 2018 most recent publication
Details
- 91 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 1,620 Total Citation Count
- Sep 15, 2005 Earliest Filing
- 20 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
2017/0213,698 Method and System for Forming Patterns Using Charged Particle Beam Lithography with Variable Pattern DosageApr 07, 17Jul 27, 17[H01J, G06F, G03F]
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9859100 Method and system for dimensional uniformity using charged particle beam lithographyMay 17, 16Jan 02, 18[H01J, G03F]
9715169 Method and system for forming a pattern on a reticle using charged particle beam lithographyMay 17, 16Jul 25, 17[H01J, G06F, G03F]
9625809 Method and system for forming patterns using charged particle beam lithography with variable pattern dosageJun 16, 16Apr 18, 17[H01J, B82Y, G06F, G03F]
9612530 Method and system for design of enhanced edge slope patterns for charged particle beam lithographyMar 11, 16Apr 04, 17[G06F, G03F]
9465297 Method and system for forming patterns with charged particle beam lithographyMay 18, 15Oct 11, 16[H01J, H01L, B82Y, G06F, G03F]
9448473 Method for fracturing and forming a pattern using shaped beam charged particle beam lithographyDec 15, 15Sep 20, 16[H01J, B82Y, G06F, G03F]
9424372 System and method for data path handling, shot count minimization, and proximity effects correction related to mask writing processMar 15, 13Aug 23, 16[G06F, G03F]
9400857 Method and system for forming patterns using charged particle beam lithographyApr 15, 13Jul 26, 16[G06F, G03F]
9372391 Method and system for forming patterns using charged particle beam lithography with variable pattern dosageJul 25, 15Jun 21, 16[H01J, B82Y, G06F, G03F]
9341936 Method and system for forming a pattern on a reticle using charged particle beam lithographyFeb 11, 14May 17, 16[H01J, G06F, G03F]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2017/0023,862 METHOD AND SYSTEM FOR FORMING PATTERNS WITH CHARGED PARTICLE BEAM LITHOGRAPHYAbandonedOct 08, 16Jan 26, 17[H01J, G03F]
2014/0353,526 METHOD AND SYSTEM FOR FORMING HIGH ACCURACY PATTERNS USING CHARGED PARTICLE BEAM LITHOGRAPHYAbandonedAug 07, 14Dec 04, 14[H01J, G06F]
2014/0129,997 METHOD AND SYSTEM FOR DIMENSIONAL UNIFORMITY USING CHARGED PARTICLE BEAM LITHOGRAPHYAbandonedMar 13, 13May 08, 14[G06F]
2014/0011,124 METHOD AND SYSTEM FOR STENCIL DESIGN FOR PARTICLE BEAM WRITINGAbandonedSep 09, 13Jan 09, 14[G06F, G03F]
2013/0283,217 METHOD AND SYSTEM FOR FORMING PATTERNS USING CHARGED PARTICLE BEAM LITHOGRAPHYAbandonedApr 15, 13Oct 24, 13[G06F]
2013/0252,143 METHOD AND SYSTEM FOR DESIGN OF ENHANCED ACCURACY PATTERNS FOR CHARGED PARTICLE BEAM LITHOGRAPHYAbandonedMay 14, 13Sep 26, 13[G06F]
2013/0070,222 Method and System for Optimization of an Image on a Substrate to be Manufactured Using Optical LithographyAbandonedSep 19, 11Mar 21, 13[G03B]
2013/0022,929 METHOD AND SYSTEM FOR MANUFACTURING A SURFACE USING SHAPED CHARGED PARTICLE BEAM LITHOGRAPHYAbandonedSep 29, 12Jan 24, 13[G21K, G03F]
2012/0278,770 METHOD AND SYSTEM FOR FORMING NON-MANHATTAN PATTERNS USING VARIABLE SHAPED BEAM LITHOGRAPHYAbandonedMar 24, 12Nov 01, 12[G06F]
2012/0217,421 METHOD AND SYSTEM FOR FORMING PATTERNS USING CHARGED PARTICLE BEAM LITHOGRAPHY WITH OVERLAPPING SHOTSAbandonedDec 18, 11Aug 30, 12[H01L, A61N, G03F]
2012/0219,886 METHOD AND SYSTEM FOR FORMING PATTERNS USING CHARGED PARTICLE BEAM LITHOGRAPHY WITH VARIABLE PATTERN DOSAGEAbandonedDec 18, 11Aug 30, 12[H01L, A61N, G03F]
2012/0221,980 METHOD AND SYSTEM FOR DESIGN OF ENHANCED ACCURACY PATTERNS FOR CHARGED PARTICLE BEAM LITHOGRAPHYAbandonedFeb 28, 11Aug 30, 12[G06F]
2012/0221,985 METHOD AND SYSTEM FOR DESIGN OF A SURFACE TO BE MANUFACTURED USING CHARGED PARTICLE BEAM LITHOGRAPHYAbandonedFeb 28, 11Aug 30, 12[G06F]
2011/0265,049 METHOD AND SYSTEM FOR STENCIL DESIGN FOR PARTICLE BEAM WRITINGAbandonedJul 01, 11Oct 27, 11[G06F]
8039176 Method for fracturing and forming a pattern using curvilinear characters with charged particle beam lithographyExpiredNov 14, 09Oct 18, 11[G06F, G03F]
7985514 Method for fracturing a pattern for writing with a shaped charged particle beam writing system using dragged shotsExpiredOct 21, 09Jul 26, 11[G06F, G03F]
2011/0089,345 METHOD AND SYSTEM FOR MANUFACTURING A SURFACE USING CHARGED PARTICLE BEAM LITHOGRAPHYAbandonedOct 05, 10Apr 21, 11[G21G, G21K]
2010/0229,148 METHOD AND SYSTEM FOR STENCIL DESIGN FOR PARTICLE BEAM WRITINGAbandonedMay 18, 10Sep 09, 10[G06F]
7579606 Method and system for logic design for cell projection particle beam lithographyExpiredDec 01, 06Aug 25, 09[G21K, G06F]
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